Materials Science in Microelectronics: Relationships Between Thin Film Processing and Structure v. I book

Materials Science in Microelectronics: Relationships Between Thin Film Processing and Structure v. I book

Materials Science in Microelectronics: Relationships Between Thin Film Processing and Structure v. I by Eugene Machlin

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Author: Eugene Machlin
Page Count: 270 pages
Published Date: 08 Nov 2005
Publisher: ELSEVIER SCIENCE & TECHNOLOGY
Publication Country: Oxford, United Kingdom
Language: English
Format: Pdf
ISBN: 9780080446400
File size: 45 Mb
Download Link: materials science in microelectronics relationships between thin film processing and structure v. i
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Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing/structure relationship, and structure/properties relationship. The first volume of "Materials Science in Microelectronics" focuses on the first relationship - that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer - determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure. This is an ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.

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